WARNING: This page is about a different car, the 2001 Mazda Protege, 2001 Mazda Millenia, 2001 Mazda MX-5 Miata, 2001 Mazda MPV, and 2001 Mazda 626. However, it is still accessible from the selected car via links, so may be relevant.
Remove vacuum chamber. Visually inspect vacuum chamber for clogging, cracks and damage. Replace as necessary.