EGR Vacuum Solenoid Valve
WARNING: This page is about a different car, the 1995 Mazda Protege. However, it is still accessible from the selected car via links, so may be relevant.
Remove EGR vacuum solenoid. Try to blow air through valve. Air should not flow. Apply 12 volts and a ground to solenoid valve terminals. See Figure . Blow air through valve. Air should flow with voltage applied. If valve does not operate as described, replace valve.